Low inductance cantilever switch

Electricity: circuit makers and breakers – Electrostrictive or electrostatic

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Details

200268, 200269, H01H 5700

Patent

active

052585913

ABSTRACT:
An apparatus is disclosed for providing an electrostatically actuated mechanical switch utilizing a cantilever beam element fabricated by solid-state microfabrication techniques. The apparatus reduces the required pull down voltage and lowers the switch inductance by separating the pull down electrode and contact pad. The pull down electrode is placed further away from the fulcrum of the cantilever beam then the contact pad to optimize the mechanical advantages which allow for a reduced pull down voltage. The contact pad is placed closer to the cantilever fulcrum to reduce the associated switch inductance. The gap between the contact pad and the cantilever beam is less then the gap between the pull down electrode and the cantilever beam to insure that the cantilever makes first contact with the contact pad.

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Semiconductor unit switches mechanically, Electronics Dec. 21, 1978 vol. 51, No. 26, pp. 32, 33.

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