Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Reexamination Certificate
2006-01-03
2008-09-02
Spector, David N (Department: 2873)
Electricity: circuit makers and breakers
Electrostrictive or electrostatic
C333S105000, C333S262000, C335S078000, C359S224200, C359S291000
Reexamination Certificate
active
07420135
ABSTRACT:
A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating beam installed above the main electrodes at a certain height; a support unit to support the actuating beam; and sub-electrodes formed above the actuating beam at a distance from the actuating beam and facing the corresponding main electrodes. The method includes depositing and patterning a metal layer on a substrate; depositing and patterning a sacrificial layer to form actuator beam support holes and first sub-electrode contact holes; depositing and patterning an actuating beam layer on the sacrificial layer, thereby forming spacers; depositing and patterning second sub-electrode contact holes from another sacrificial layer; depositing and patterning a sub-electrode layer on the sacrificial layer; and removing the two sacrificial layers.
REFERENCES:
patent: 7049904 (2006-05-01), Shin
patent: 7251069 (2007-07-01), Kim et al.
patent: 2005/0219017 (2005-10-01), Shirakawa
patent: 2006/0087716 (2006-04-01), Kweon et al.
Kim Che-heung
Kweon Soon-cheol
Lee Sang-hun
Shin Hyung-jae
Samsung Electronics Co,. Ltd.
Spector David N
Sughrue & Mion, PLLC
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