Mechanical switch
Membrane for micro-electro-mechanical switch, and methods of...
MEMS device with integral packaging
MEMS micro-relay with coupled electrostatic and...
MEMs switching system
Mesoscale MEMS switch apparatus and method
Method and apparatus for an improved single pole double throw mi
Micro electro-mechanical system switch and method of...
Micro electro-mechanical system switch and method of...
Micro electro-mechanical system with one or more moving...
Micro power switch
Micro-electro mechanical system
Micro-electromechanical switch
Micro-electromechanical system device
Microelectromechanical switch with fixed metal...
Microelectromechanical system (MEMS) digital electrical...
Microfabricated double-throw relay with multimorph actuator...
Microfabricated relay with multimorph actuator and...
Micromachine switch
Micromachine switch and its production method