Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Patent
1998-03-09
2000-04-25
Luebke, Renee S.
Electricity: circuit makers and breakers
Electrostrictive or electrostatic
H01H 5700
Patent
active
06054659&
ABSTRACT:
Structures and fabrication methods of micromachined all-metal relays on silicon chips are described. The relay comprises a copper blade, electroformed into the lithographically patterned areas, with suitable dimensions of 1 mm.times.2 mm.times.0.01 mm (width.times.length.times.thickness) and a plurality of longitudinal slots to facilitate fabrication of the blade. The relay is actuated by electrostatic force, and no conduction current is required to hold the relay at either "on" or "off" state. Preferably, the relay is used in combination with a suitable arc suppression circuit.
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Chang Shih-Chia
Hicks David Byrum
Lee Han-Sheng
Leung Chi Hung
Lorincz Samuel
General Motors Corporation
Griffin Patrick M.
Luebke Renee S.
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