4. Electricity: circuit makers and breakers
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Radio frequency MEMS switch contact metal selection

Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Reexamination Certificate

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Radiofrequency or hyperfrequency micro-switch structure and...

Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Reexamination Certificate

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Recessed etch RF micro-electro-mechanical switch

Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Patent

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RF microelectromechanical systems device

Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Reexamination Certificate

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