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Microelectromechanical system with stiff coupling

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microelectromechanical systems actuttor using a time-varying...

Electrical generator or motor structure – Dynamoelectric – Rotary
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Microelectromechanical systems including thermally actuated...

Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate

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Microelectromechanical transducer and fabrication method

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microelectromechanics-based frequency signature sensor

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Microelectromechnical system for tilting a platform

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechnical system for tilting a platform

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectronic structures including semiconductor islands

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Microelement piezoelectric feedback type picking and...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
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Microfabricated acoustic source and receiver

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Microfabricated harmonic side-drive motors

Electrical generator or motor structure – Dynamoelectric – Rotary
Patent

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Microfabricated microengine for use as a mechanical drive and po

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microfabricated microengine with constant rotation rate

Electrical generator or motor structure – Dynamoelectric – Rotary
Patent

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Microfabricated rotary motion wobble motor and disk drive incorp

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microfabricated torsional drive utilizing lateral...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microfabricated transducers formed over other circuit...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
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Microfabricated vertical comb actuator using plastic...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microfabricated vertical comb actuator using plastic...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Micromachine

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Micromachine and method of fabricating the same

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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