Microelectromechanical system with stiff coupling
Microelectromechanical systems actuttor using a time-varying...
Microelectromechanical systems including thermally actuated...
Microelectromechanical transducer and fabrication method
Microelectromechanics-based frequency signature sensor
Microelectromechnical system for tilting a platform
Microelectromechnical system for tilting a platform
Microelectronic structures including semiconductor islands
Microelement piezoelectric feedback type picking and...
Microfabricated acoustic source and receiver
Microfabricated harmonic side-drive motors
Microfabricated microengine for use as a mechanical drive and po
Microfabricated microengine with constant rotation rate
Microfabricated rotary motion wobble motor and disk drive incorp
Microfabricated torsional drive utilizing lateral...
Microfabricated transducers formed over other circuit...
Microfabricated vertical comb actuator using plastic...
Microfabricated vertical comb actuator using plastic...
Micromachine
Micromachine and method of fabricating the same