Microfabricated microengine with constant rotation rate

Details Microfabricated microengine with constant rotation rate Microfabricated microengine with constant rotation rate

1997-12-01

1999-09-21

Dougherty, Thomas M.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 42, 310 80, 310 37, 310112, H02K 700, H02K 706, F16H 2122

Patent

active

059558016

ABSTRACT:
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into constant rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque at a constant rotation to a micromechanism. The output gear can have gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.

REFERENCES:
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5631514 (1997-05-01), Garcia et al.
Mehran Mehregany, Stephen D. Senturia, and Jeffrey H. Lang, Friction and Wear in Microfabricated Harmonic Side-Drive Motors, IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, S.C., Jun. 4-7. IEEE Catalogue No. 90CH2783-9, pp. 17-22.

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