Micro-electromechanical devices having variable capacitors...
Micro-electromechanical energy storage device
Micro-electromechanical structure resonator frequency...
Micro-electromechanical structure resonator frequency...
Micro-electromechanical structure resonator, method of...
Micro-electromechanical structure resonator, method of...
Micro-electromechanical voltage converter
Micro-electrostatic motor
Micro-fabricated device with integrated electrostatic actuator
Micro-fabricated devices having a suspended membrane or...
Micro-generator module and clockwork movement containing such a
Micro-machined resonator
Micro-miniature stepping motor
Micro-mirror device with increased mirror tilt
Micro-mirror with rotor structure
Micro-motor and apparatus using the same motor
Micro-motor with low cogging torque
Micro-mover with balanced dynamics
Micro-oscillation element having two rotational axes that...
Micro-oscillation element incorporating springs