Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-08-16
2011-08-16
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S328000, C310S338000
Reexamination Certificate
active
07999440
ABSTRACT:
The invention relates to micro-fabricated devices having a suspended membrane or plate structure and micro-fabrication techniques for making such devices. A substrate defines a cavity passing through the substrate, and the cavity defines a first opening. An intermediate portion is disposed over the substrate and defines a second opening. The second opening is larger in size than the first opening, and the dimensions of the second opening are controlled according to a parameter associated with performance of the device. A membrane is positioned adjacent the second opening.
REFERENCES:
patent: 5129262 (1992-07-01), White et al.
patent: 5189914 (1993-03-01), White et al.
patent: 5216680 (1993-06-01), Magnusson et al.
patent: 5332469 (1994-07-01), Mastrangelo
patent: 5454904 (1995-10-01), Ghezzo et al.
patent: 5490034 (1996-02-01), Zavracky et al.
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5565625 (1996-10-01), Howe et al.
patent: 5605598 (1997-02-01), Greiff
patent: 5725729 (1998-03-01), Greiff
patent: 5760305 (1998-06-01), Greiff
patent: 5919364 (1999-07-01), Lebouitz et al.
patent: 5969250 (1999-10-01), Greiff
patent: 6192757 (2001-02-01), Tsang et al.
patent: 6223598 (2001-05-01), Judy
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6388789 (2002-05-01), Bernstein
patent: 6433401 (2002-08-01), Clark et al.
patent: 6506620 (2003-01-01), Scharf et al.
patent: 6673694 (2004-01-01), Borenstein
patent: 6688158 (2004-02-01), Cunningham et al.
patent: 6778908 (2004-08-01), Martorana et al.
patent: 6790775 (2004-09-01), Fartash
patent: 6837097 (2005-01-01), Cunningham et al.
patent: 6851297 (2005-02-01), Cunningham et al.
patent: 6870624 (2005-03-01), Hobbs et al.
patent: 6887391 (2005-05-01), Daneman et al.
patent: 6946314 (2005-09-01), Sawyer et al.
patent: 6951715 (2005-10-01), Cunningham et al.
patent: 6990259 (2006-01-01), Cunningham
patent: 7000453 (2006-02-01), Cunningham et al.
patent: 7023544 (2006-04-01), Cunningham et al.
patent: 7070987 (2006-07-01), Cunningham et al.
patent: 7074311 (2006-07-01), Cunningham
patent: 7094595 (2006-08-01), Cunningham et al.
patent: 7101660 (2006-09-01), Cunningham et al.
patent: 7109633 (2006-09-01), Weinberg et al.
patent: 7118710 (2006-10-01), Cunningham
patent: 7142296 (2006-11-01), Cunningham et al.
patent: 7148964 (2006-12-01), Cunningham et al.
patent: 7153702 (2006-12-01), Lin et al.
patent: 7158230 (2007-01-01), Cunningham et al.
patent: 7162125 (2007-01-01), Schulz
patent: 7170599 (2007-01-01), Cunningham et al.
patent: 7175980 (2007-02-01), Qiu et al.
patent: 7197198 (2007-03-01), Schulz et al.
patent: 7202076 (2007-04-01), Cunningham et al.
patent: 7217574 (2007-05-01), Pien et al.
patent: 7264973 (2007-09-01), Lin et al.
patent: 7292336 (2007-11-01), Cunningham et al.
patent: 7298477 (2007-11-01), Cunningham et al.
patent: 7300803 (2007-11-01), Lin et al.
patent: 7301628 (2007-11-01), Cunningham et al.
patent: 7306827 (2007-12-01), Li et al.
patent: 7309614 (2007-12-01), Baird et al.
patent: 7312090 (2007-12-01), Lin et al.
patent: 7400399 (2008-07-01), Wawro et al.
patent: 7410811 (2008-08-01), Lin et al.
patent: 2002/0067106 (2002-06-01), Sunwoo et al.
patent: 2003/0010745 (2003-01-01), Field
patent: 2003/0012693 (2003-01-01), Otillar et al.
patent: 2003/0194710 (2003-10-01), Yang
patent: 2004/0043615 (2004-03-01), Yamamoto et al.
patent: 2004/0065638 (2004-04-01), Gogoi
patent: 2004/0159629 (2004-08-01), Busta
patent: 2004/0175300 (2004-09-01), Indermuhle et al.
patent: 2004/0197931 (2004-10-01), Indermuhle et al.
patent: 2005/0045276 (2005-03-01), Patel et al.
patent: 2005/0064619 (2005-03-01), Chavan et al.
patent: 2005/0082944 (2005-04-01), Thompson et al.
patent: 2005/0089924 (2005-04-01), Ho et al.
patent: 2005/0148147 (2005-07-01), Keating et al.
patent: 2005/0157096 (2005-07-01), Truninger et al.
patent: 2006/0286685 (2006-12-01), Miller et al.
patent: 2008/0121042 (2008-05-01), Miller et al.
patent: 103 55 572 (2005-07-01), None
patent: 05-029633 (1993-02-01), None
Chapman, Glenn et al., “Bi/In Thermal Resist for Both Si Anisotropic Wet Etching and Si/SiO2Plasma Etching” Presented at SPIE Micro04, Photonics West, Micromachining and Microfabrication Process Technology IX, v. 5342, (12 pages).
Chen, Kuo-Shen et al., “Silicon Strength Testing for Mesoscale Structural Applications,” Mat. Res. Soc. Symp. Proc. Vo. 518, (1998) pp. 123-130.
Chen, Kuo-Shen et al., “Controlling and Testing the Fracture Strength of Silicon on the Mesoscale,” Journal of the American Ceramic Society, 83 [6] (2000), pp. 1476-1484.
Chen, Kuo-Shen et al., “Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures After Deep Reactive Ion Etching (DRIE),” Journal of Microelectromechanical Systems, vol. 11, No. 3, Jun. 2002, pp. 264-275.
Hu, S. M., “Critical Stress in Silicon Brittle Fracture, and Effect of Ion Implantation and Other Surface Treatments,” Journal of Applied Physics 53(5), May 1982, pp. 3576-3580.
Lin, Chung-Hsien et al., “Design and Fabrication of a Miniaturized Bulk Acoustic Filter by High Aspect Ratio Etching,” J. Microlith., Microfab., Microsyst. (Jul.-Sep. 2005), vol. 4(3), pp. 033010-1-033010-7.
Milanovic, Veljko, “Multilevel Beam SOI-MEMS Fabrication and Applications,” Journal of Microelectromechanical Systems, vol. 13, No. 1, Feb. 2004, pp. 19-30.
Wilson, Carol J., et al., “Fracture Testing of Bulk Silicon Microcantilever Beams Subjected to a Side Load,” Journal of Microelectromechanical Systems, vol. 5, No. 3, Sep. 1996, pp. 142-150.
Yallup, Kevin, “The Application and Commercialization of SOI as a Material for Advanced Microsystems,” Future Fab International, Issue 19, pp. 1-9, Available at (http://www.future-fab.com/documents.asp?grID=208&d—ID=1182, Last visited Sep. 6, 2005.
Sung-Sik Yun et al., “Fabrication of vertical optical plane using DRIE and KOH crystalline etching of (110) silicon wafer,” Sensors and Actuators A 128 (2006), 387-394 (XP 5367228A).
Li, Jishan, et al., “Piezoelectric immunosensor based on magnetic nanoparticles with simple immobilization procedures”, Analytica Chimica Acta, vol. 481, pp. 191-198, (2003).
Masters Brett P.
Miller Michael
BioScale, Inc.
Dougherty Thomas M
Proskauer Rose LLP
LandOfFree
Micro-fabricated devices having a suspended membrane or... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micro-fabricated devices having a suspended membrane or..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-fabricated devices having a suspended membrane or... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2739673