Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-12-09
1993-03-30
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310346, 310344, 310353, 310361, H01L 4108
Patent
active
051987163
ABSTRACT:
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
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Godshall Ned A.
Koehler Dale R.
Liang Alan Y.
Smith Bradley K.
Budd Mark O.
Chafin James H.
Moser William R.
Ojanen Karla
The United States of America as represented by the United States
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