Micro-machined resonator

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

310346, 310344, 310353, 310361, H01L 4108

Patent

active

051987163

ABSTRACT:
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.

REFERENCES:
patent: Re26707 (1969-11-01), Cutler et al.
patent: 2002167 (1935-05-01), Bechmann
patent: 2161980 (1939-06-01), Runge et al.
patent: 2677775 (1954-05-01), Font
patent: 2699508 (1955-01-01), Fastenau, Jr.
patent: 3931388 (1976-01-01), Hafner et al.
patent: 3988621 (1976-10-01), Nakayama et al.
patent: 4135108 (1979-01-01), Besson
patent: 4216402 (1980-08-01), Engdahl
patent: 4234811 (1980-11-01), Hishida et al.
patent: 4334168 (1982-06-01), Besson et al.
patent: 4362961 (1982-12-01), Gerber
patent: 4393131 (1983-07-01), Whalin et al.
patent: 4445256 (1984-05-01), Huguenin et al.
patent: 4471259 (1984-09-01), Stoermer et al.
patent: 4639632 (1987-01-01), Nakata et al.
patent: 4651042 (1987-03-01), Nakamura et al.
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4831304 (1989-05-01), Dorey et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
K. Petersen, "Silicon as a Mechanical Material," Proceedings of the IEEE. vol. 70, No. 5, May 1982, pp. 420-457.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Micro-machined resonator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-machined resonator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-machined resonator will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1283312

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.