Electrostatic actuator and camera module using the same
Electrostatic actuator and camera module using the same
Electrostatic actuator and camera module using the same
Electrostatic actuator and method of controlling the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and method of driving the same
Electrostatic actuator and power generator
Electrostatic actuator driving method and mechanism, using...
Electrostatic actuator for microelectromechanical systems...
Electrostatic actuator for micromechanical systems
Electrostatic actuator having electrodes with deformation...
Electrostatic actuator having ferroelectrics in which residual d
Electrostatic actuator including stable electrode column and...
Electrostatic actuator using films
Electrostatic actuator with different electrode spacing
Electrostatic actuator with fault tolerant electrode structure