Electrostatic actuator and method of driving the same

Details Electrostatic actuator and method of driving the same Electrostatic actuator and method of driving the same

2007-01-23

2007-01-23

Tamai, Karl I. E. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000

Reexamination Certificate

active

10299662

ABSTRACT:
First and second stationary members are arranged to face each other, and a movable member is arranged between these first and second stationary members so as to be movable in a predetermined direction. An electrode groups including a plurality of stationary electrodes having the same width and sequentially arranged at substantially the same pitch in a predetermined direction is formed on each of these stationary electrodes. Also, a movable electrode having a width in the predetermined direction, which is larger than the width of each of the stationary electrodes constituting the electrode group, is arranged on the movable member. First and second voltage signal patterns differing from each other in the timing are applied to the stationary electrodes constituting the electrode group. When the movable member is driven in the predetermined direction by one of the first and second voltage signal patterns, the voltage signal pattern serving to drive the movable member is determined as the driving signal.

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