Electrostatic actuator and method of controlling the same

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

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310 68B, 324457, H02N 100

Patent

active

055347401

DESCRIPTION:

BRIEF SUMMARY
BACKGROUND OF THE INVENTION

The present invention relates to an electrostatic actuator powered by electrostatic power and, more specifically, to an electrostatic actuator capable of being efficiently controlled without adversely affecting the features thereof, and a method of controlling the electrostatic actuator.


DESCRIPTION OF THE PRIOR ART

Electrostatic generators have been generally known as devices for converting mechanical energy into electrostatic energy. The function of the electrostatic motor is the reverse of the electrostatic generator; that is, the electrostatic motor converts electrostatic energy into mechanical energy.
The electrostatic motor has a long history; studies of the electrostatic motor have been made since the eighteenth century. The electrostatic motor is described in detail, for example, in Seidenki Gakkai, "Seidenki Hando Bukku", Ohmu-sha, pp. 654-675. An induction motor utilizing a delay in the polarization of a dielectric is shown in this book. The principle of the induction motor is based on the fact that a dielectric is polarized when placed in an electric field, and the induction motor utilizes the delay in the polarization of the dielectric. That is, when a dielectric rotor is placed in a rotating electric field created in a stator, a dielectric load on the rotor is caused to lag behind the rotating electric field by the delay in polarization. The interaction between the charges of the rotor and the rotating electric field produces torque. Another type of motor employs a resistor instead of a dielectric. This motor uses a delay in charges induced in the resistor placed in a rotating electric field relative to the direction of the electric field.
The prior art electrostatic motor, however, has the following problems.
(a) The attraction between the resistor and the electrodes makes the use of a film resistor difficult.
(b) The electrostatic motor is a rotary structure comprising a stator and a rotor, and the stator and the rotor are disposed with a gap therebetween, and bearings and the like are used to maintain the gap. Accordingly, it is difficult to arrange the stator and the rotor with a small gap therebetween over a large area. Each of the stator and the rotor needs to have a sufficiently large thickness and a high rigidity to arrange the stator and the rotor with a small gap therebetween, which reduces the density of force, i.e., force produced per unit area.
Thus, it has been difficult to form the electrostatic motor in a compact construction and the density of force of the electrostatic motor is relatively small.
An electrostatic actuator solving the foregoing problems is proposed in, for example, "Electrostatic Actuator Employing a Moving Resistor" Denki Gakkai Zenkoku Taikai 1989 Koen Ronbun-shu, No. 737. This electrostatic actuator comprises a stator provided with a plurality of strip electrodes insulated from each other, a moving member disposed opposite to the stator, a charge pattern inducing device for inducing a charge pattern in the vicinity of the surface of the moving member according to a voltage pattern applied to the strip electrodes, accessories and a control unit for changing the voltage applied to the strip electrodes to drive the moving member.
A mechanism for generating a driving force by static electricity will be described in detail hereinafter with reference to FIGS. 3(A), 3(B) and 3(C) which illustrate a structure in accordance with the present invention. In general, however, the mechanism operates as follows.
When predetermined voltages are applied to the plurality of strip electrodes of a first member, such as a stator, charges are collected in portions of a second member disposed such as a moving member, opposite to the strip electrodes, by the electric fields created by the strip electrodes. Then, the moving member is attracted to the stator and held stably on the stator by a frictional force. Then, the voltages applied to the strip electrodes are changed to shift the voltage pattern and, consequently, charges of the same polarities as

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