Electrostatic actuator using films

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

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Details

310 12, H02N 100, H02K 4100

Patent

active

052392228

DESCRIPTION:

BRIEF SUMMARY
FIELD OF THE INVENTION

The present invention relates to an electrostatic actuator using ultra thin film.


BACKGROUND OF THE INVENTION

An electrostatic generator has been proposed as a means for converting mechanical energy into electric field energy, while an electrostatic motor is known as a means for converting electric field energy into mechanical energy.
Such electrostatic motor has a long history and investigations have already been started from 19th century. For example, it is described in detail in the "HANDBOOK OF STATIC ELECTRICITY", P664 P675, written by Academic Circles of Static Electricity, published by OHM PUBLICATION CO.
This paper refers to an induction motor utilizing delayed polarization of dielectric material.
This induction motor is based on the principle that a dielectric material placed under the electric field is poralized and such delayed poralization is used.
Namely, as shown in FIG. 8, in case an inductor b as a rotor is placed within the rotary field within a stator a, an induced load of dielectric material b is deviated in angle from the rotary field due to time delay. A mutual effect between charge and rotary field becomes a rotating force.
Moreover, a motor using a resistance material in place of dielectric material is also proposed. This motor utilizes charges induced within the resistance material under the rotary field are delayed to control direction of field.
However, a conventional electrostatic motor has following problems.
(1) An induction motor described above cannot utilize films because an absorbing force is generated between a resistance material and electrodes.
(2) This motor is formed by a rotary mechanism providing a certain gap between stator and rotor. A mechanism such as bearing is used to hold such gap. Therefore, it is difficult to form narrow gap for a wider area. Moreover, realization of narrow gap will require sufficiently thick stator and rotor to obtain high rigidity and thereby a force density (force generated in the unit area) may be deteriorated.
Accordingly, it is difficult to form a compact induction motor and it has only a low force density.


SUMMARY OF THE INVENTION

Considering such problems of the prior art, it is therefore an object of the present invention to provide an electrostatic actuator using a film which generates an electrostatic force between solid surfaces, has a narrow gap and increases the surface area to obtain a larger force density.
The object of the present invention described above can be attained by an electrostatic actuator using a film comprising a stator having a plurality of belt type electrodes wired in an insulator, a migrator placed on this stator and is formed by an insulation material film and resistance material film and a means for floating and driving the migrator and conducting positioning by changing a voltage to be applied to the belt type electrodes; or an electrostatic actuator comprising a base to be fixed, a stator extended from the base and having a plurality of belt type electrodes wired in an insulator, a migrator having a plurality of films with the open end side placed on the films and the other end coupled with the base and a means for floating and driving the migrator and conducting positioning by changing a voltage to be applied to the belt type electrodes; or an electrostatic actuator using films comprising a stator having a plurality of concentric belt type electrodes wired in the insulation material, a migrator placed on the stator and formed by insulation material film and resistance material film and a means for floating the migrator and giving a radial tension to the migrator by changing a voltage to be applied to the belt type electrodes.
According to the present invention, as shown in FIG. 1 and FIG. 2, the lower stator 1 is formed by burying belt type electrodes 4 in the insulation material 2. Meanwhile, the migrator 10 is formed by the insulation material layer film 11 and resistance material layer film 12 and is placed in contact on the stator 1. As explained later, a voltage is sel

REFERENCES:
patent: 4230978 (1980-10-01), Gardella, Jr. et al.
patent: 4754185 (1988-06-01), Gabriel et al.
patent: 4814657 (1989-03-01), Yano et al.
patent: 4894569 (1990-01-01), Lardiere, Jr. et al.
patent: 5015906 (1991-05-01), Cho et al.
patent: 5043043 (1991-08-01), Howe et al.
Philips Technical Review, vol. 30, 1969, No. 6/7, "Electrostatic Motors", B. Bollee, pp. 178-194.
Proc., IEEE Micro Electro Mechanical Systems Workshop, Napa Valley, CA, Feb. 11-14, 1990, "Multi-Layered Electrostatic Film Actuator", Saku Egawa et al., pp. 166-171.

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