Electrostatic actuator having electrodes with deformation...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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Reexamination Certificate

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07868516

ABSTRACT:
When a mover during moving is displaced in a direction (X2 direction) perpendicular to a moving direction, between a deformation pattern portion formed in stator-side electrodes of a stator and a deformation pattern portion formed in mover-side electrodes of the mover, a restoring force trying to return the mover toward a direction (X1 direction) opposite to the X2 direction acts on the mover. This makes it possible to prevent the mover from displacement, and consequently to provide an electrostatic actuator improved in the linear movability toward the moving direction.

REFERENCES:
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patent: 5461272 (1995-10-01), Matsumoto
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patent: 2009/0079296 (2009-03-01), Takahashi
patent: 04-172973 (1992-06-01), None
patent: 04-271284 (1992-09-01), None
patent: 09-233858 (1997-09-01), None
patent: 2003-309666 (2003-11-01), None
patent: 2005-019981 (2005-01-01), None
patent: 2005/050266 (2004-10-01), None
Manual Translation of 04-271284, “electrostatic actuator”, Nishiguchi Noboru et al., Sep. 28, 1992.

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