Linear motor, and secondary for a linear motor

Linear motor, and stage apparatus and exposure apparatus using t

Linear motor, and stage device and exposure apparatus provided w

Linear motor, driving and control system thereof and...

Linear motor, exposure apparatus using the same, and device...

Linear motor, exposure apparatus using the same, and device...

Linear motor, its controlling method, and XY table

Linear motor, method for controlling the same, and linear...

Linear motor, moving stage system, exposure apparatus, and...

Linear motor, moving stage system, exposure apparatus, and...

Linear motor, stage apparatus and exposure apparatus

Linear motor, stage apparatus, and exposure apparatus

Linear motor, stage apparatus, exposure apparatus, and...

Linear motor, stage apparatus, exposure apparatus, and...

Linear motor, stage apparatus, exposure apparatus, and...

Linear motor, stage device, and exposing device

Linear motor-driven table apparatus capable of operating both in

Linear motors

Linear motors and stages comprising same that produce...

Linear moving coil actuator