Linear motor, stage apparatus, exposure apparatus, and...

Details Linear motor, stage apparatus, exposure apparatus, and... Linear motor, stage apparatus, exposure apparatus, and...

2007-10-16

2007-10-16

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

11138567

ABSTRACT:
In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162).

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