Linear motor, and stage device and exposure apparatus provided w

Details Linear motor, and stage device and exposure apparatus provided w Linear motor, and stage device and exposure apparatus provided w

1997-10-15

2000-07-04

Dougherty, Thomas M.

Electrical generator or motor structure

Dynamoelectric

Linear

310 58, 310 60A, H02K 4100, H02K 919

Patent

active

060843195

ABSTRACT:
A linear motor including a coil and a jacket which covers the coil and allows a cooling medium to be supplied through a space in the jacket. The jacket is made of an insulating material, such as a ceramic material or a high-polymer resinous material. The linear motor can include a reinforcing member in the jacket for strengthening the jacket against the pressure of the cooling medium. Also disclosed are a stage device, an exposure apparatus, and a device producing method using such a linear motor.

REFERENCES:
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patent: 5304285 (1994-04-01), Meinecke et al.
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patent: 5486962 (1996-01-01), Boutaghou
patent: 5703417 (1997-12-01), Kelly
patent: 5770899 (1998-06-01), Hayashi
patent: 5898245 (1999-04-01), Cochimin

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