Linear motor, moving stage system, exposure apparatus, and...

Details Linear motor, moving stage system, exposure apparatus, and... Linear motor, moving stage system, exposure apparatus, and...

2005-12-01

2008-03-25

Lam, Thanh (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

07348695

ABSTRACT:
A linear motor includes a coil and a plurality of magnets disposed along a central axis of the coil. The magnetization directions of the plurality of magnets have different tilts with respect to the central axis.

REFERENCES:
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6002465 (1999-12-01), Korenaga
patent: 6025658 (2000-02-01), Kamata
patent: 6037680 (2000-03-01), Korenaga et al.
patent: 6104108 (2000-08-01), Hazelton et al.
patent: 6107703 (2000-08-01), Korenaga
patent: 6177978 (2001-01-01), Korenaga
patent: 6208045 (2001-03-01), Hazelton et al.
patent: 6265793 (2001-07-01), Korenaga
patent: 6414742 (2002-07-01), Korenaga et al.
patent: 6479991 (2002-11-01), Korenaga
patent: 6523650 (2003-02-01), Pribonic et al.
patent: 6633217 (2003-10-01), Post
patent: 6717296 (2004-04-01), Hol et al.
patent: 6870284 (2005-03-01), Uchida
patent: 2002/0117903 (2002-08-01), Uchida
patent: 2002/0149270 (2002-10-01), Hazelton
patent: 2003/0007140 (2003-01-01), Korenaga
patent: 2003/0102723 (2003-06-01), Korenaga
patent: 2003/0217694 (2003-11-01), Korenaga
patent: 2002-238241 (2002-08-01), None
patent: 2002-325421 (2002-11-01), None
European Search Report dated Oct. 2, 2006, issued in corresponding European patent application No. EP 04 25 0763, forwarded in a Communication dated Oct. 9, 2006.

Affiliated with

Also associated with

Rating

Linear motor, moving stage system, exposure apparatus, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Linear motor, moving stage system, exposure apparatus, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Linear motor, moving stage system, exposure apparatus, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3975467