Linear motor, stage apparatus, and exposure apparatus

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Details

C318S135000

Reexamination Certificate

active

06864602

ABSTRACT:
A linear motor includes a coil unit and a magnet unit. The coil unit includes an inner yoke extending in a moving direction and a coil arranged outside the inner yoke. The magnet includes a magnet arranged outside the coil. Each of the inner yoke, coil, and magnet includes a plurality of flat portions, the plurality of flat portions of the inner yoke are parallel to an axis of the coil. Each flat portion of the inner yoke is parallel to the corresponding flat portion of the coil and the corresponding flat portion of the magnet. A length of the inner yoke in a direction along the axis of the coil is longer than a length of the magnet in the direction along the axis of the coil, and the inner yoke has a prismatic structure formed by the plurality of flat portions supported by a support member.

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