Linear motor, stage device, and exposing device

Details Linear motor, stage device, and exposing device Linear motor, stage device, and exposing device

1998-10-14

2000-03-28

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Linear

H02K 4100

Patent

active

060435720

ABSTRACT:
A linear motor includes a coil for receiving an electrical current and a first plurality of permanent magnets. The coil and the first plurality of permanent magnets move relative to each other in a direction of relative movement when an electrical current flows through the coil. The permanent magnets are arrayed in the direction of relative movement to form a first array. The direction of polarity of each permanent magnet in the first plurality of permanent magnets is oriented 90.degree. relative to the direction of polarity of an adjacent permanent magnet in the first plurality of permanent magnets. The first plurality of permanent magnets has a main portion and an end portion comprising plural corrective permanent magnets. Each of the plural corrective permanent magnets is smaller than the permanent magnets in the main portion having the same or opposite direction of polarity.

REFERENCES:
patent: 4859974 (1989-08-01), Kliman et al.
patent: 4912746 (1990-03-01), Oishi
patent: 5032746 (1991-07-01), Ueda et al.
patent: 5723929 (1998-03-01), Niimi

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