Plasma reactor

Plasma reactor and plasma reaction apparatus

Plasma reactor and purification equipment

Plasma reactor having a symmetric parallel conductor coil...

Plasma reactor using inductive RF coupling, and processes

Plasma reactor with spoke antenna having a VHF mode with the...

Plasma source

Plasma source and method of manufacturing

Plasma source employing spiral RF coil and method for using same

Plasma source ion implanting apparatus using the same

Plasma source with multiple magnetic flux sources each...

Plasma source with reliable ignition

Plasma stabilizing apparatus employing feedback controls

Plasma sterilizer and method

Plasma sterilizer apparatus using a non-flammable mixture of hyd

Plasma switch with hollow, thermionic cathode

Plasma treatment apparatus and plasma generation method...

Plasma treatment apparatus and plasma treatment method

Plasma treatment apparatus and plasma treatment method...

Plasma vacuum pump