Plasma source

Details Plasma source Plasma source

2005-05-11

2008-03-11

Vu, David H. (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111310, C315S111410, C118S7230AN, C118S7230IR

Reexamination Certificate

active

07342361

ABSTRACT:
A plasma source is described. The source includes a reactive impedance element formed from a plurality of electrodes. By providing such a plurality of electrodes and powering adjacent electrodes out of phase with one another, it is possible to improve the characteristics of the plasma generated.

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