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System and method for generating a discharge in high...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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System and method for generating ions and radicals

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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System and method for inductive coupling of an expanding...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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System and method for initiating plasma production

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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System for high power RF plasma processing

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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System for ion energy control during plasma processing

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Systems and methods for ion source control in ion implanters

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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