Method and apparatus for improved plasma processing uniformity

Method and apparatus for injection of a plasma

Method and apparatus for measuring electron density of plasma

Method and apparatus for plasma containment

Method and apparatus for plasma treating a chemical species

Method and apparatus for producing high density plasma using whi

Method and apparatus for producing intense microwave pulses

Method and apparatus for producing large volume magnetoplasmas

Method and apparatus for producing microwave radiation

Method and apparatus for producing uniform process rates

Method and apparatus for producing uniform process rates

Method and apparatus for producing uniform process rates

Method and apparatus for projecting solids-containing gaseous me

Method and apparatus for providing flow-stabilized...

Method and apparatus for reducing ozone output from ion wind...

Method and apparatus for selectively distributing power in a thr

Method and apparatus for stabilizing switch-mode powered RF plas

Method and apparatus for the excitation of a plasma

Method and apparatus for transmitting information using arc

Method and apparatus for tuning a plasma reactor chamber