4. Electric lamp and discharge devices: systems
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Double-chamber ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Driving frequency modulation system and method for plasma...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Dual discharge plasma device

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Dual filament ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Dual mode ion source for ion implantation

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Dual plasma beam sources and method

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Dual plasma source for plasma process chamber

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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