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Modulated temperature method of atomic layer deposition...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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MT CVD process

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Multi-layer approach for optimizing ferroelectric film performan

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Multiple precursor cyclical deposition system

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Multiple precursor cyclical deposition system

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Multiple precursor cyclical deposition system

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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