4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Housing or package
  6. With window means
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MEMS device wafer-level package

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Method for manufacturing encapsulated opto-electronic...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Method of and apparatus for sealing an hermetic lid to a...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Methods of fabrication of package assemblies for optically...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Microelectromechanical device packages with integral heaters

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Microelectronic device package with an integral window

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Microelectronic device package with an integral window...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Miniature microdevice package and process for making thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
Reexamination Certificate

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Multilayered microelectronic device package with an integral...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
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