Environmental conditioning of workpieces

Flash vaporizing water jet and piercing with flash vaporization

Grinding machine and grinding fluid supply-nozzle therefor

Grinding method and device for the same

Honing method and honing apparatus

Injecting an air stream with sublimable particles

Interpenetrating network for chemical mechanical polishing

Low temperature chemical mechanical polishing of dielectric...

Machine tool device and its working fluid feed device

Magnetic head bar holding unit, lapping device, and method...

Method and apparatus for chemical-mechanical polishing

Method and apparatus for controlling a temperature of a polishin

Method and apparatus for controlling a temperature of a...

Method and apparatus for endpointing mechanical and...

Method and apparatus for heating polishing pad

Method and apparatus for high speed singulation

Method and apparatus for polishing

Method and apparatus for slurry temperature control in a...

Method and apparatus for stabilizing the process temperature...

Method and system for cleaning a surface with CO.sub.2 pellets t