4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yuan-Ko Hwang

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Apparatus for controlling etch rate when using consumable electr

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Effective photoresist stripping process for high dosage and...

Radiation imagery chemistry: process – composition – or product th – Stripping process or element – Forming nonplanar image
Reexamination Certificate

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Method and apparatus for in-situ descum/hot bake/dry etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for monitoring plasma chamber condition by

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Method and system for on-line monitoring plasma chamber conditio

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-176637

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