4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Yoshinobu Arita

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Apparatus for growing a thin metallic film

Coating apparatus – Gas or vapor deposition – With treating means
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Bipolar transistors

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Bipolar transistors having vertically arrayed collector-base-emi

Metal working – Method of mechanical manufacture – Assembling or joining
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma etching apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-53000

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