4. Coating apparatus
  5. Gas or vapor deposition

Yijun Liu

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Metal oxide film formation method and apparatus

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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Method of forming silicon-containing insulation film having...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Method of forming silicon-containing insulation film having...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method to mitigate impact of UV and E-beam exposure on...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods to obtain low k dielectric barrier with superior...

Semiconductor device manufacturing: process – Having organic semiconductive component
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Profile ID: LFUS-PAI-P-354236

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