4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Yasuhiko Nara

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Apparatus for inspecting a specimen

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Circuit pattern inspection method and apparatus

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Circuit pattern inspection method and apparatus

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Circuit pattern inspection method and its apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Circuit-pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2214974

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