Circuit pattern inspection method and apparatus

Details Circuit pattern inspection method and apparatus Circuit pattern inspection method and apparatus

2005-05-24

2005-05-24

Mehta, Bhavesh M. (Department: 2625)

Image analysis

Applications

Manufacturing or product inspection

C382S147000, C382S172000, C356S394000

Reexamination Certificate

active

06898305

ABSTRACT:
The present invention provides techniques, including a method and system, for inspecting for defects in a circuit pattern on a semi-conductor material. One specific embodiment provides a trial inspection threshold setup method, where the initial threshold is modified after a defect analysis of trial inspection stored data. The modified threshold is then used as the threshold in actual inspection.

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Abstract, JP App. 57-196377(A), “Pattern Recognizing Mehtod”, Feb. 12, 1982.

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