4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

William A. Lanford

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Apparatus for detection of surface contaminations on silicon waf

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Oxidation resistant high conductivity copper layers for microele

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Passivated copper conductive layers for microelectronic applicat

Metal treatment – Process of modifying or maintaining internal physical... – Producing or treating layered – bonded – welded – or...
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Passivated copper conductive layers for microelectronic applicat

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Process of making oxidation resistant high conductivity copper l

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-552582

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