Process of making oxidation resistant high conductivity copper l

Details Process of making oxidation resistant high conductivity copper l Process of making oxidation resistant high conductivity copper l

1994-05-05

1997-04-22

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419217, 427123, 4273766, 4273831, 148277, 148282, 438768, C23C 1434

Patent

active

056226080

ABSTRACT:
A process for preparing an oxidation resistant, electrically conductive copper layer on a substrate, and copper layers so formed, are disclosed. A copper layer is deposited onto the surface of a substrate, and subsequently annealed. The copper layer includes magnesium in an amount sufficient to form an inert magnesium oxide layer at the surface of the copper layer upon annealing.

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