4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Wiping

Westech Systems, Inc.

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Apparatus for interlayer planarization of semiconductor material

Abrasive tool making process – material – or composition – With carbohydrate or reaction product thereof
Patent

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Apparatus for transporting wafer to and from polishing head

Abrasive tool making process – material – or composition – Impregnating or coating an abrasive tool
Patent

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Apparatus for transporting wafer to and from polishing head

Abrasive tool making process – material – or composition – With carbohydrate or reaction product thereof
Patent

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Cleaning brush for semiconductor wafer

Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent

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Conditioner for a polishing pad and method therefor

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Patent

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