4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Walter Merry

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Etch enhancement using an improved gas distribution plate

Drying and gas or vapor contact with solids – Apparatus – Houses – kilns – and containers
Patent

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Low volume gas distribution assembly and method for a chemical d

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Low volume gas distribution assembly for a chemical downstream e

Semiconductor device manufacturing: process – Chemical etching
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Polymer removal from top surfaces and sidewalls of a semiconduct

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Polymer removal from top surfaces and sidewalls of a semiconduct

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-60581

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