Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1996-05-29
1998-03-17
Nguyen, Nam
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156345, 118715, 20429807, 20429833, 216 67, H01L 2100, C23F 100
Patent
active
057282609
ABSTRACT:
An improved low-volume gas distribution assembly for a chemical downstream etch tool includes a focusing collar positioned within a process chamber and having a depending shroud in close proximity to a wafer chuck. An apertured gas delivery conduit rests on channels formed in slanted sides of a central tube of the focusing collar. The apertures in the gas delivery conduit are patterned and dimensioned to provide substantially uniform distribution of a process gas over the upper surface of the workpiece. The central tube is sealed with a cover plate and the process chamber is covered with a chamber lid.
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Brown William
Herchen Harald
Merry Walter
Nzeadibe Ihi
Alejandro Luz
Applied Materials Inc.
Glenn Michael A.
Nguyen Nam
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