4. Abrading
  5. Work holder
  6. Work rotating

Venkata R. Balagani

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Chemical mechanical polishing pad for controlling polishing...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Polishing pad conditioner and methods of manufacture and...

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Polishing pad conditioner with shaped abrasive patterns and...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Retaining ring with shaped surface

Abrading – Machine – Rotary tool
Reexamination Certificate

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Retaining ring with shaped surface

Abrading – Abrading process – Combined abrading
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2281241

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