Polishing pad conditioner and methods of manufacture and...

Details Polishing pad conditioner and methods of manufacture and... Polishing pad conditioner and methods of manufacture and...

2005-09-20

2005-09-20

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S072000, C451S443000, C451S539000

Reexamination Certificate

active

06945857

ABSTRACT:
A recycled polishing pad conditioner comprises a base plate and a reversed abrasive disc that is flipped over from its original configuration. The reversed disc comprises an exposed abrasive face having an unused abrasive face comprising abrasive particles. A bond face of the disc is affixed to the base plate, the bond face comprising a used abrasive face that was previously used to condition polishing pads. Also described is a pad conditioner having an abrasive face comprising exposed portions of abrasive particles, with at least about 60% of the abrasive particles having a crystalline structure with substantially the same crystal symmetry.

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