Polishing pad conditioner with shaped abrasive patterns and...

Details Polishing pad conditioner with shaped abrasive patterns and... Polishing pad conditioner with shaped abrasive patterns and...

2006-06-27

2006-06-27

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Machine

Rotary tool

C451S443000, C451S444000, C451S548000

Reexamination Certificate

active

07066795

ABSTRACT:
A polishing pad conditioner comprises a base and a pad conditioning face on the base. The conditioning face comprises central and peripheral regions. Abrasive spokes having a substantially constant width of abrasive particles, extend from the central to the peripheral region. The spokes are symmetric and radially spaced apart from one another, and may have a variety of shapes. The conditioning face can also have a cutout inlet channel to receive polishing slurry when the conditioning face is rubbed against a polishing pad, a conduit to receive the polishing slurry from the cutout inlet channel, and an outlet on the peripheral edge of the base to discharge the received polishing slurry.

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U.S. Application entitled, “Polishing Pad Conditioner and Methods of Manufacture and Recycling”; filed Jul. 8, 2004; Appl. No. 10/888,941; Inventors: Doan, et al.

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