Abrading – Machine – Rotary tool
Reexamination Certificate
2004-11-12
2008-03-18
Nguyen, Dung Van (Department: 3723)
Abrading
Machine
Rotary tool
C451S398000
Reexamination Certificate
active
07344434
ABSTRACT:
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
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Allen Aden Martin
Balagani Venkata R.
Chen Hung Chih
De Lamenie Romain Beau
Doan Trung T.
Applied Materials Inc.
Fish & Richardson
Nguyen Dung Van
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