4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Uwe Schulze

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Advanced process control model incorporating a target offset...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method and system for advanced process control including...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and system for automatically detecting exposed...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Method and system for estimating a state of an uninitialized...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and system for improving exposure uniformity in a...

Photocopying – Projection printing and copying cameras – Step and repeat
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Profile ID: LFUS-PAI-P-2419270

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