Method and system for advanced process control including...

Details Method and system for advanced process control including... Method and system for advanced process control including...

2008-07-22

2008-07-22

Masinick, Michael D (Department: 2128)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C700S109000, C700S121000, C700S044000, C438S005000, C438S014000, C216S067000

Reexamination Certificate

active

07403832

ABSTRACT:
A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.

REFERENCES:
patent: 6427093 (2002-07-01), Toprac
patent: 6535774 (2003-03-01), Bode et al.
patent: 6738722 (2004-05-01), Polla et al.
patent: 7200455 (2007-04-01), Schulze
patent: 2003/0078684 (2003-04-01), Martin et al.
patent: 1 317 694 (2004-04-01), None

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