Method and system for estimating a state of an uninitialized...

Details Method and system for estimating a state of an uninitialized... Method and system for estimating a state of an uninitialized...

2007-06-19

2007-06-19

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

11383005

ABSTRACT:
An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.

REFERENCES:
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patent: 2004/0102857 (2004-05-01), Markle et al.
patent: 2006/0195213 (2006-08-01), Wagner et al.
patent: 2006/0271225 (2006-11-01), Schulze et al.
patent: 2007/0048635 (2007-03-01), Schulze et al.
patent: 1317694 (2002-03-01), None
Sarfaty et al. :Advance Process Control Solutions for Semiconductor Manufacturing, IEEE/SEMI Advanced Semiconducotr Manufactruing Conference, 2002 pp. 101-106.

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