4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Usha Raghuram

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Conductive hard mask to protect patterned features during...

Semiconductor device manufacturing: process – Direct application of electrical current – To alter conductivity of fuse or antifuse element
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Diode array and method of making thereof

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
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Liner for tungsten/silicon dioxide interface in memory

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for etching and/or patterning a silicon-containing layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for forming doped polysilicon via connecting...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1155603

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