4. Optics: measuring and testing
  5. By configuration comparison
  6. With photosensitive film or plate

Timothy J. Dalton

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Adopting feature of buried electrically conductive layer in...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
Reexamination Certificate

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Adopting feature of buried electrically conductive layer in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Adopting feature of buried electrically conductive layer in...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
Reexamination Certificate

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Air gap under on-chip passive device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Apparatus and method for real-time measurement of thin film laye

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
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