Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With semiconductor element forming part
Inventor
active
Apparatus and method for housing micromechanical systems
Deflectable micromechanical system and use thereof
Method of fabricating a micromechanical structure out of...
Micromechanical device with adjustable resonant frequency by...
Micromechanical device with tilted electrodes
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Profile ID: LFUS-PAI-P-2215926