Method of fabricating a micromechanical structure out of...

Details Method of fabricating a micromechanical structure out of... Method of fabricating a micromechanical structure out of...

2011-04-19

2011-04-19

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

Reexamination Certificate

active

07929192

ABSTRACT:
In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.

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English language translation of an Official Communication issued in corresponding Chinese Patent Application No. 2008100818043, mailed on Jun. 23, 2010.

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